SLP offers below system please contact us directly.
Nanotechnology/Thin Film
Thin Film Deposition
- E-Beam Evaporation
- PECVD
- Sputtering
- Thermal Evaporation
Etching
- Reactive Ion Etching
- Deep Reactive Ion Etching
- Ion Beam Milling
Thin Film Growth
- ALD: Atomic Layer Deposition System.
- PA-MOCVD - Table Top Plasma Assisted Metal Organic Chemical Vapor Deposition (PA-MOCVD)
Wafer Cleaning Systems
Wet Cleaning
- Single Wafer Cleaners (SWC)
- Large Substrate Cleaner (LSC)
- Pelliclized and Unpelliclized Reticle
Dry Cleaning
- Plasma Ashing Systems
Dual Chamber Systems
Auto Wafer Transfer between Two Chambers
Space Simulation Systems
Platens and Plasma Source.